Whickham implanter upgrade
The MCMASTER university, in Canada, needed to upgrade its Whickham ™ implanter to be able to implant wafers of 150 mm (6 "). CAP Engineering manufactured a R&D chamber equipped with a universal holder for every type of samples up to 150 mm, with a system of apertures exchangeable, with one "setup flag " and a system of electrostatic scanning and focus.
Mission : Design, realization and upgrading
Customer : McMaster University, Hamilton, Canada
Delivery : 2013
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Manufacture and installation of a R&D chamber for 150 mm samples. Development of an electrostatic focus and scanning system
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Manufacture of a universal holder for samples up to 150 mm, process chamber of treatment, an electrostatic focus and scanning system
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Manufacture of a 500°C heating platen for 4 inches wafer for the same university
