R&D 50KV ion implanter Project
Development of a 50KV Ion Implanter in collaboration with IONLINKS. Freeman type source equipped with an high-pressure neutral gas box (Ar, He, N2, ...) containing 2 lines with independent purge system, a high temperature crucible 1000 ° C, an Extraction electrode mounted on 3 axis manipulator and a Target Chamber with flag and manipulator.
Mission : Design and manufacturing
Customer : research center, United-States
Delivery : 2016
Development of a 50KV ion implanter for a research center in the United States including :
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Design a Freeman type ion source
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2-lines gas box with independent purge system
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Extraction Electrode mounted on a 3 axis (Tilt, X et Z) manipulator separateur
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High temperature crucible 1000°C
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Research chamber with Flag and manipulator.
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Fiber optique Control system (PFC).
- Implementation of a Supervision system under LabVIEW.
