EATON 200MC IMPLANTER UPGRADE
An 200MC ion implanter dating from the 1980s had to be refurbished and returned to a more reliable use. Improvements were also made and new features added during this mission of refurbishing and upgrading.
Mission : refurbish and upgrade
Customer : Strasbourg CNRS, FRANCE (67)
Delivery : 2016
Project of refurbishing of an 200MC ion implanter built at the beginning of the 1980s, modernization and upgrading of the machine :
- Return to the safety standards of equipment
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Improvement of the electronics and the management of the fluids
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Renovation of the system of control commands and development of a supervision software under LabVIEW
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Manufacture of a gas box, implementation of a new system of scanning and dosimetry
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Addition of new features: installation of a deceleration mode for ions beam until 1KV
