An NV3204 ion implanter dating from the 1980s had to be refurbished and returned to a more reliable use. Improvements were also made and new features added during this mission of refurbishing and upgrading.

Mission : refurbish and upgrade

Customer : Poitiers CNRS FRANCE (86)

Delivery : 2013

Project of refurbishing of an NV3204 ion implanter built at the beginning of the 1980s, modernization and upgrading of the machine :

  • Return to the safety standards of equipment
  • Improvement of the electronics and the management of the fluids

  • Renovation of the electricity network, the system of control commands and development of a supervision software under LabVIEW
  • Boite à gaz 3 lignes

    Manufacture of a gas box, a sputter ion source, implementation of a new system of scanning and dosimetry
  • Addition of new features: possibility of using cathodic spraying sputtering sources and installation of a deceleration mode for ions beam until 1KV