AXCELIS NV3204 IMPLANTER UPGRADE
An NV3204 ion implanter dating from the 1980s had to be refurbished and returned to a more reliable use. Improvements were also made and new features added during this mission of refurbishing and upgrading.
Mission : refurbish and upgrade
Customer : Poitiers CNRS FRANCE (86)
Delivery : 2013
Project of refurbishing of an NV3204 ion implanter built at the beginning of the 1980s, modernization and upgrading of the machine :
-
Return to the safety standards of equipment
-
Improvement of the electronics and the management of the fluids
-
Renovation of the electricity network, the system of control commands and development of a supervision software under LabVIEW
-
Manufacture of a gas box, a sputter ion source, implementation of a new system of scanning and dosimetry
-
Addition of new features: possibility of using cathodic spraying sputtering sources and installation of a deceleration mode for ions beam until 1KV
